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Proceedings Paper

Arsenic Doped Silica As A Passive Waveguiding Material
Author(s): Steven D. Hubbard; B. James Ainslie; Stephen A. Bailey; Graeme D. Maxwell
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Paper Abstract

Arsenic doped silica glass (ASG) is a material which is well known to the electronics industry, due to its use in integrated circuit manufacture as a conformal covering for circuitry. We report here, for the first time, the use of ASG as a low loss waveguiding material. The guiding films were made by a CVD process, carried out between 400 and 450 °C. Three inch silica and thermal oxide coated silicon substrates were used. The thermal oxide layer was between 2 μm and 10 μm thick. Typical films which have been investigated were 1.5-2 μm thick and had a refractive index of about 1.51 at 632.8 nm, corresponding to an As2O3 content of approximately 10 mol%. They have also been patterned using standard photolithographic techniques. The properties of planar films and ridge waveguides will he discussed. We present results of loss measurements made by prism coupling into planar films and from end-fire launching into ridge guides. The scattered light was detected using a computer controlled camera system. Typically, we have measured a loss of 0.50 dBcm-1 with ±5% error for the lowest order TE mode in a planar film at 632.8 nm. The effects of reflow of the ASG on the measured loss of the guides will he illustrated. The potential for reducing this loss and the use of ASG as a passive waveguide material in integrated optics will also he discussed.

Paper Details

Date Published: 8 January 1990
PDF: 7 pages
Proc. SPIE 1125, Thin Films in Optics, (8 January 1990); doi: 10.1117/12.961359
Show Author Affiliations
Steven D. Hubbard, British Telecom Research Laboratories (United Kingdom)
B. James Ainslie, British Telecom Research Laboratories (United Kingdom)
Stephen A. Bailey, British Telecom Research Laboratories (United Kingdom)
Graeme D. Maxwell, British Telecom Research Laboratories (United Kingdom)

Published in SPIE Proceedings Vol. 1125:
Thin Films in Optics
Theo T. Tschudi, Editor(s)

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