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Proceedings Paper

Phase Demodulation Of Interference Fringes With Spatial Carrier
Author(s): Satoru Toyooka
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Paper Abstract

A simple method to retrieve phase modulation of interference fringes with spatial carrier is discussed. A part of the argorithm can be easily replaced by a hardware system of analogue electronic circuite. It is shown that the method is suitable to analyze dynamic fringes which have rather small phase gradient. As an example, displacement measurement by using a modified Michelon interferometer is shown. Accurate measurement in which random errors were less than 7 nm was realized by a simple hand-fablicated system.

Paper Details

Date Published: 3 April 1989
PDF: 4 pages
Proc. SPIE 1121, Interferometry '89, (3 April 1989); doi: 10.1117/12.961266
Show Author Affiliations
Satoru Toyooka, Saitama University (Japan)

Published in SPIE Proceedings Vol. 1121:
Interferometry '89
Zbigniew Jaroszewicz; Maksymilian Pluta, Editor(s)

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