Proceedings PaperPhase Demodulation Of Interference Fringes With Spatial Carrier
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A simple method to retrieve phase modulation of interference fringes with spatial carrier is discussed. A part of the argorithm can be easily replaced by a hardware system of analogue electronic circuite. It is shown that the method is suitable to analyze dynamic fringes which have rather small phase gradient. As an example, displacement measurement by using a modified Michelon interferometer is shown. Accurate measurement in which random errors were less than 7 nm was realized by a simple hand-fablicated system.