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Proceedings Paper

Industrial Microprocessing Applications Of Excimer Lasers
Author(s): J. Sercel; U. Sowada; H J Kahlert; D. Basting; L. Austin
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Paper Abstract

Various industrial microprocessing applications of excimer lasers will be reviewed as well as the requirement and suitability of excimer lasers for each application.

Paper Details

Date Published: 16 December 1988
PDF: 8 pages
Proc. SPIE 0998, Excimer Beam Applications, (16 December 1988); doi: 10.1117/12.960213
Show Author Affiliations
J. Sercel, Lambda Physik, Inc. (United States)
U. Sowada, Lambda Physik, Inc. (United States)
H J Kahlert, Lambda Physik, Inc. (United States)
D. Basting, Lambda Physik, Inc. (United States)
L. Austin, Lambda Physik, Inc. (United States)

Published in SPIE Proceedings Vol. 0998:
Excimer Beam Applications
Anthony N. Pirri; Bernhard P. Piwczyk, Editor(s)

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