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Proceedings Paper

Integrated Optical Devices Based On Silica Waveguide Technologies
Author(s): T. Miyashita; S. Sumida; S. Sakaguchi
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Paper Abstract

A wide variety of integrated optical devices was developed based on silica glass waveguide technologies. High performance waveguide with low loss and well-controlled configuration is formed on silicon substrate by a combination of flame hydrolysis deposition, photolithographic and reactive ion etching processes. This waveguide technology also has the great advantage of guiding groove structure for hybridizing optical fibers and chips onto the waveguide. Based on this silica glass waveguide technology, several types of integrated optical devices such as branching, WDM, polarization control, resonance and switching devices have been constructed and tested.

Paper Details

Date Published: 6 December 1988
PDF: 7 pages
Proc. SPIE 0993, Integrated Optical Circuit Engineering VI, (6 December 1988); doi: 10.1117/12.960102
Show Author Affiliations
T. Miyashita, Photonic Integration Research, Inc. (United States)
S. Sumida, Photonic Integration Research, Inc. (United States)
S. Sakaguchi, Photonic Integration Research, Inc. (United States)

Published in SPIE Proceedings Vol. 0993:
Integrated Optical Circuit Engineering VI
Mark A. Mentzer, Editor(s)

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