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Proceedings Paper

Reproducible Fabrication Of Integrated Optical Components By Charge Controlled Ion Exchange In Glass
Author(s): R. Klein; D. Jestel; H. J. Lilienhof; E. Voges
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Paper Abstract

Integrated optical components in glass are commonly fabricated by a thermal or a field assisted ion exchange. Applying an elctrical field reduces the ion exchange time drastically. Usually the process is performed at fixed voltages and different exchange times1 . We realized that reproducibility is accompanied with great difficulties using this technique. A reproducible fabrication of optical waveguides is achieved by using the exchanged charge as the determining process parameter. The ion current is integrated by a control unit which automatically terminates the exchange process when the preset charge is reached. The charge corresponds to the amount of exchanged ions and a reproducible process is available.

Paper Details

Date Published: 6 December 1988
PDF: 6 pages
Proc. SPIE 0993, Integrated Optical Circuit Engineering VI, (6 December 1988); doi: 10.1117/12.960064
Show Author Affiliations
R. Klein, Universitat Dortmund (Germany)
D. Jestel, Universitat Dortmund (Germany)
H. J. Lilienhof, Universitat Dortmund (Germany)
E. Voges, Universitat Dortmund (Germany)

Published in SPIE Proceedings Vol. 0993:
Integrated Optical Circuit Engineering VI
Mark A. Mentzer, Editor(s)

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