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Proceedings Paper

Characterization Of Scattering From Diamond-Turned Surfaces
Author(s): Steven R Lange; Robert E. Parks
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Paper Abstract

Methods of characterizing t roughness of and scattering from plane single-point diamond-turned surfaces include Nomarski mlcroscopy, microscopic double-beam and multiple-beam interferometry, mechanical profilometry, normalized scatter, and BRDF measurements. Size and curvature parameters limit the usefulness of some of these techniques in the study of nonflat, real-life hardware. A nartial solution to the problems of characterizing curved surfaces is t use replication methods. Polishing reduces the surface roughness and scattering from nonflat single-point diamond-turned surfaces.

Paper Details

Date Published: 3 March 1981
PDF: 8 pages
Proc. SPIE 0257, Radiation Scattering in Optical Systems, (3 March 1981); doi: 10.1117/12.959613
Show Author Affiliations
Steven R Lange, University of Arizona (United States)
Robert E. Parks, University of Arizona (United States)

Published in SPIE Proceedings Vol. 0257:
Radiation Scattering in Optical Systems
Gary H. Hunt, Editor(s)

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