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Proceedings Paper

Excimer Laser Technology
Author(s): Phillip N. Mace
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Paper Abstract

Scaling presently available excimer laser systems to lasers designed to operate at high average power and high pulse repetition rates for long periods of time requires advances in many areas of engineering technology. For economical application to industrial processes, the efficiency must be increased. This leads to more stringent requirements on preionization techniques, energy delivery systems, and system chemistry. Long life operation (>109-1010 pulses) requires development of new pulse power components, optical elements and flow system components. A broad-based program underway at the Los Alamos Scientific Laboratory is addressing these key technology issues, with the help of advanced component and systems development programs in industry. A prototype XeCl laser meeting all requirements for efficiency, system performance and life is scheduled for completion in 1984.

Paper Details

Date Published: 31 October 1980
PDF: 8 pages
Proc. SPIE 0247, Advances in Laser Engineering and Applications, (31 October 1980); doi: 10.1117/12.959388
Show Author Affiliations
Phillip N. Mace, AP-1 Los Alamos Scientific Laboratory MS-566 (United States)

Published in SPIE Proceedings Vol. 0247:
Advances in Laser Engineering and Applications
Malcolm L. Stitch, Editor(s)

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