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Proceedings Paper

Noncontacting Measurement Of Surface Roughness
Author(s): W. T. Welford
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Paper Abstract

For many purposes it is useful to describe a rough surface by some statistical parameters rather than deterministically; thus the variance of surface height and the correlation length may be useful statistical parameters which summarize the properties of surfaces produced by given methods. The use of scattered coherent light to obtain these parameters will be explained.

Paper Details

Date Published: 13 May 1981
PDF: 4 pages
Proc. SPIE 0235, Aspheric Optics: Design, Manufacture, Testing, (13 May 1981); doi: 10.1117/12.958970
Show Author Affiliations
W. T. Welford, Imperial College (United Kingdom)

Published in SPIE Proceedings Vol. 0235:
Aspheric Optics: Design, Manufacture, Testing
L. R. Baker; K. J. Rosenbruch, Editor(s)

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