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Proceedings Paper

High-Precision Measurement Of Aspheric Surfaces
Author(s): J. G. Dil; W. Mesman; J. C. Driessen
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Paper Abstract

We report the operation of a new instrument which measures with ± 5 nm precision the shape of steep aspheric surfaces. The instrument makes use of contacting probes, and its working is based on an optical differential technique. Special attention is paid to the mechanical construction, and a detailed error analysis is given.

Paper Details

Date Published: 13 May 1981
PDF: 7 pages
Proc. SPIE 0235, Aspheric Optics: Design, Manufacture, Testing, (13 May 1981); doi: 10.1117/12.958966
Show Author Affiliations
J. G. Dil, Philips Research Laboratories (The Netherlands)
W. Mesman, Philips Research Laboratories (The Netherlands)
J. C. Driessen, Philips Research Laboratories (The Netherlands)

Published in SPIE Proceedings Vol. 0235:
Aspheric Optics: Design, Manufacture, Testing
L. R. Baker; K. J. Rosenbruch, Editor(s)

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