The Zygo Interferometer System is designed to be suitable for a large spectrum of measurement applications. The fact that it has been widely accepted and is being used in its various configurations establishes the viability of the system architecture upon which it is based. The purpose of this paper is to provide a comprehensive description of this system so as to establish a base-line for what this state-of-the-art and off-the-shelf system can provide.

Date Published: 25 December 1979
PDF: 9 pages
Proc. SPIE 0192, Interferometry, (25 December 1979); doi: 10.1117/12.957835

Published in SPIE Proceedings Vol. 0192:
Interferometry
George W. Hopkins, Editor(s)