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Proceedings Paper

Theory And Application Of Laser Interferometer Systems
Author(s): Lucia S. Liu; John H. Klinger
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Paper Abstract

The theory and operation of the laser interferometer is explained in this paper. The laser system is widely used in the metal working industry, IC manufacturing, RED and a growing new area of disc drive track writing. The type of measurements made include length, angle, flatness, straightness and squareness. The advantage of the laser over conventional equipment includes high speed, versatility and the inherent accuracy of the system.

Paper Details

Date Published: 25 December 1979
PDF: 10 pages
Proc. SPIE 0192, Interferometry, (25 December 1979); doi: 10.1117/12.957832
Show Author Affiliations
Lucia S. Liu, Hewlett-Packard Company (United States)
John H. Klinger, Hewlett-Packard Company (United States)

Published in SPIE Proceedings Vol. 0192:
George W. Hopkins, Editor(s)

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