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Proceedings Paper

Dynamic surface roughness profiler
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Paper Abstract

A dynamic profiler is presented that is capable of precision measurement of surface roughness in the presence of significant vibration or motion. Utilizing a special CCD camera incorporating a micro-polarizer array and a proprietary LED source, quantitative measurements were obtained with exposure times of <100 μsec. The polarization-based interferometer utilizes an adjustable input polarization state to optimize fringe contrast and signal to noise for measurement of optical surfaces ranging in reflectivity from 1 to 100%. A new phase calculation algorithm is presented that nearly eliminates phase-dependent errors resulting in shot noise limited performance. In addition to its vibration immunity, the system’s light weight, <5 kg, compact envelope, 24 x 24 x 8 cm, integrated alignment system, and multiple mounting options facilitate use both directly resting on large optical surfaces and directly mounted to polishing equipment, stands, gantries and robots. Measurement results presented show an RMS repeatability <0.005 nm and an RMS precision < 0.1nm which are achieved without active vibration isolation.

Paper Details

Date Published: 15 October 2012
PDF: 12 pages
Proc. SPIE 8501, Advances in Metrology for X-Ray and EUV Optics IV, 85010D (15 October 2012); doi: 10.1117/12.956503
Show Author Affiliations
Brad Kimbrough, 4D Technology Corp. (United States)
Neal Brock, 4D Technology Corp. (United States)
James Millerd, 4D Technology Corp. (United States)

Published in SPIE Proceedings Vol. 8501:
Advances in Metrology for X-Ray and EUV Optics IV
Lahsen Assoufid; Peter Z. Takacs; Anand Krishna Asundi, Editor(s)

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