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Proceedings Paper

Precision Laser Micromachining
Author(s): Jerry Boogaard
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Paper Abstract

Lasers continue to enter many exciting new fields that have been traditionally the domain of other equipment. Lately, lasers and their associated precision positioning equipment have replaced the more conventional methods used in the micromachining area because of better control, repeatability and precision. This paper discusses some of the latest applications of laser micromachining utilizing a medium-powered Nd:YAG laser. Topics will include machining ceramics, silicon and other materials as well as precise removal of thin films from various substrates. Some of the techniques created to accomplish the required results will be shown as well as improvements over previous methods.

Paper Details

Date Published: 7 July 1986
PDF: 14 pages
Proc. SPIE 0611, Laser Processing of Semiconductors & Hybrids, (7 July 1986); doi: 10.1117/12.956411
Show Author Affiliations
Jerry Boogaard, Electro Scientific Industries, Inc. (United States)

Published in SPIE Proceedings Vol. 0611:
Laser Processing of Semiconductors & Hybrids
Edward J. Swenson, Editor(s)

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