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Proceedings Paper

Commercial Excimer Lasers
Author(s): Herbert Pummer
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Paper Abstract

Excimer lasers form a group of pulsed high-pressure gas lasers which emit at four wave-lengths, namely at 193nm (ArF*), 248nm (KrF*), 308nm (XeCl*) and 351nm (XeF*) in the ultraviolet spectral region. Unlike the infrared radiation from lasers like e.g. Nd:YAG and CO2, the high energy photons from excimer lasers typically interact with the electronic excitation levels of an absorber and this can lead to chemical bond breaking, ionization or electronic excitation. The excellent focusability of their short wave-length radiation can further be exploited to generate submicron structures.

Paper Details

Date Published: 16 July 1986
PDF: 5 pages
Proc. SPIE 0610, Scientific and Engineering Applications of Commercial Laser Devices, (16 July 1986); doi: 10.1117/12.956380
Show Author Affiliations
Herbert Pummer, Lambda Physik, Inc. (United States)

Published in SPIE Proceedings Vol. 0610:
Scientific and Engineering Applications of Commercial Laser Devices
Rick Feinberg; Lewis Holmes; Morris Levitt, Editor(s)

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