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Proceedings Paper

Dimensional Gauging Using A Scanning Laser Beam
Author(s): Carl A. Zanoni
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Paper Abstract

There is increasing interest in non-contacting sensors to perform dynamic, in-process gauging to achieve closed-loop adaptive control of manufacturing processes. After a brief review of current instrumentation, a detailed description will be given of those engineering principles and design features which must be considered to achieve stable, reliable measurements with an optical sensor using a scanning laser beam. Several applications will also be discussed.

Paper Details

Date Published: 21 November 1977
PDF: 7 pages
Proc. SPIE 0126, Clever Optics: Innovative Applications of Optics, (21 November 1977); doi: 10.1117/12.955896
Show Author Affiliations
Carl A. Zanoni, Zygo Corporation (United States)

Published in SPIE Proceedings Vol. 0126:
Clever Optics: Innovative Applications of Optics
N. Balasubramanian; James C. Wyant, Editor(s)

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