The copy camera resolves 320 lines/mm on high-resolution film with less than 0.01-mm distortion throughout a 30-mm-diameter image made at 20:1 reduction in white or green light. This performance is the result of five special features: (1) an f/4 precision copy lens, which makes diffraction-limited images throughout the image field; (2) a precision focusing mount; (3) a pressure plate that maintains sharp focus for step-and-repeat exposures; (4) a simple indexing jig that locates the images precisely on 101.6- by 127.0-mm film; and (5) a film holder with registration pins to position the prepunched film precisely in relation to the image positions. The camera is used routinely to make single- and stepped-image photofabrication masks, high-contrast resolution test charts, and special reticles.

Date Published: 20 September 1976
PDF: 5 pages
Proc. SPIE 0080, Developments in Semiconductor Microlithography, (20 September 1976);

Published in SPIE Proceedings Vol. 0080:
Developments in Semiconductor Microlithography
James W. Giffin, Editor(s)