Share Email Print
cover

Proceedings Paper

Evaluation Of Rank Prismatic Lens
Author(s): Richard A. Rosenthal
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

In practical microcircuitry a two-dimensional source array is necessary to cater for various types and directional orientation of optical features at the image plane. Configurations successfully applied are the annulus and a distribution of sources at the points of a hexagon and an octagon. In each case a single concentrated mercury arc lamp is used as prime source and effectively multiplied or extended by optical means.

Paper Details

Date Published: 20 September 1976
PDF: 4 pages
Proc. SPIE 0080, Developments in Semiconductor Microlithography, (20 September 1976);
Show Author Affiliations
Richard A. Rosenthal, Fairchild Semiconductor (United States)


Published in SPIE Proceedings Vol. 0080:
Developments in Semiconductor Microlithography
James W. Giffin, Editor(s)

© SPIE. Terms of Use
Back to Top
PREMIUM CONTENT
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?
close_icon_gray