Proceedings Paper
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Paper Abstract
In practical microcircuitry a two-dimensional source array is necessary to cater for various types and directional orientation of optical features at the image plane. Configurations successfully applied are the annulus and a distribution of sources at the points of a hexagon and an octagon. In each case a single concentrated mercury arc lamp is used as prime source and effectively multiplied or extended by optical means.
Paper Details
Date Published: 20 September 1976
PDF: 4 pages
Proc. SPIE 0080, Developments in Semiconductor Microlithography, (20 September 1976); doi: 10.1117/12.954828
Published in SPIE Proceedings Vol. 0080:
Developments in Semiconductor Microlithography
James W. Giffin, Editor(s)
PDF: 4 pages
Proc. SPIE 0080, Developments in Semiconductor Microlithography, (20 September 1976); doi: 10.1117/12.954828
Show Author Affiliations
Richard A. Rosenthal, Fairchild Semiconductor (United States)
Published in SPIE Proceedings Vol. 0080:
Developments in Semiconductor Microlithography
James W. Giffin, Editor(s)
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