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Proceedings Paper

Microalignment Of Vacuum Deposited Thin-Film Imagery
Author(s): G. Kramer; J. M. Graf
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Paper Abstract

This paper discusses the additive thin-film technology developed and employed at Aerojet. The rationale for the selection of an additive thin-film process, the fixturing, tooling and alignment techniques employed in this technology, the fabrication of the deposition masks, and some examples of the resulting thin-film imagery are described.

Paper Details

Date Published: 1 March 1974
PDF: 8 pages
Proc. SPIE 0055, Technological Advances in Micro and Submicro Photofabrication Imagery, (1 March 1974); doi: 10.1117/12.954258
Show Author Affiliations
G. Kramer, Aerojet ElectroSystems Company (United States)
J. M. Graf, Aerojet ElectroSystems Company (United States)

Published in SPIE Proceedings Vol. 0055:
Technological Advances in Micro and Submicro Photofabrication Imagery
William Converse; J. M. Graf, Editor(s)

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