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Proceedings Paper

Diffractogram Step And Repeatability Testing
Author(s): Robert E. Lewis
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Paper Abstract

By stepping opaque rectangles which are closely adjacent, the gap between edges defines a single slit which by coherent illumination produces a diffraction pattern on film. This diffractogram recording is improved by an attenuator of decreasing density away from the axis. The method applies to step and repeat error measurement, as well as mask and copy line size evaluation.

Paper Details

Date Published: 1 March 1974
PDF: 2 pages
Proc. SPIE 0055, Technological Advances in Micro and Submicro Photofabrication Imagery, (1 March 1974); doi: 10.1117/12.954247
Show Author Affiliations
Robert E. Lewis, Timelapse, Inc. (United States)

Published in SPIE Proceedings Vol. 0055:
Technological Advances in Micro and Submicro Photofabrication Imagery
William Converse; J. M. Graf, Editor(s)

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