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Proceedings Paper

Performance Characteristics Of A Narrow Band Industrial Excimer Laser
Author(s): R. K. Brimacombe; T. J. McKee; E. D. Mortimer; B. Norris; J. Reid; T. A. Znotins
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Paper Abstract

In this paper, the performance characteristics of the INDEX 300 lithographic industrial excimer laser are presented. The laser operates with a linewidth of 3.0 pm and spectral purity of 94%. The wavelength stability is better than ± 1.0 pm over short and long term operation in both continuous and intermittent modes. By means of a novel technique, an absolute wavelength standard is used as a reference for wavelength stabilization. The advantages of this approach to wavelength stabilization are discussed.

Paper Details

Date Published: 25 July 1989
PDF: 8 pages
Proc. SPIE 1088, Optical/Laser Microlithography II, (25 July 1989); doi: 10.1117/12.953170
Show Author Affiliations
R. K. Brimacombe, Lumonics Inc. (Canada)
T. J. McKee, Lumonics Inc. (Canada)
E. D. Mortimer, Lumonics Inc. (Canada)
B. Norris, Lumonics Inc. (Canada)
J. Reid, Lumonics Inc. (Canada)
T. A. Znotins, Lumonics Inc. (Canada)

Published in SPIE Proceedings Vol. 1088:
Optical/Laser Microlithography II
Burn Jeng Lin, Editor(s)

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