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Proceedings Paper

Vibration Tolerance in Optical Imaging
Author(s): B. J. Lin
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Paper Abstract

The effects of object-to-image vibration are studied with the purpose to quantitatively define the maximum acceptable vibration level as a function of resolution, linewidth control, exposure and focus tolerances, proximity condition, and illumination coherence. The exposure-defocus trees and windows of optically projected images are used to derive the vibration tolerance as well as the optimum exposure as a function of vibration amplitude. Dimensionless variables for resolution, focus and exposure are used so that the results are universally applicable for any given diffraction-limited lens system.

Paper Details

Date Published: 25 July 1989
PDF: 9 pages
Proc. SPIE 1088, Optical/Laser Microlithography II, (25 July 1989); doi: 10.1117/12.953139
Show Author Affiliations
B. J. Lin, IBM General Technology Division (United States)

Published in SPIE Proceedings Vol. 1088:
Optical/Laser Microlithography II
Burn Jeng Lin, Editor(s)

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