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Proceedings Paper

Applications of STM Technologies
Author(s): Paul E. West; Sheila Henely
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Paper Abstract

Measurement of submicron device structures on semiconductors requires increased accuracy from metrology equipment. Scanning Tunneling Microscopy (STM) techniques are being used to meet these needs. Operating in air, these devices generate 3-D images of surface features with a resolution similar to that of a Scanning Electron Microscope (SEM) operating in vacuum.

Paper Details

Date Published: 19 July 1989
PDF: 8 pages
Proc. SPIE 1087, Integrated Circuit Metrology, Inspection, and Process Control III, (19 July 1989); doi: 10.1117/12.953113
Show Author Affiliations
Paul E. West, QuanScan, Inc. (United States)
Sheila Henely, QuanScan, Inc. (United States)

Published in SPIE Proceedings Vol. 1087:
Integrated Circuit Metrology, Inspection, and Process Control III
Kevin M. Monahan, Editor(s)

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