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Proceedings Paper

Multi-Beam Laser Plotter For Glass Plates
Author(s): Akira Kuwabara; Koji Ozaki; Takumi Yoshida
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Paper Abstract

We have developed a high-speed, high-precision raster-scan laser plotter for producing images on glass plates. This system is designed for producing precision photo masks used for various electronic devices such flat panel displays as liquid crystal, plasma, fluorescent tube, thermal printer heads, and IC lead frames. The multi-beam laser plotter splits an argon ion laser beam into 40 separate beams, each of which can be individually switched ON or OFF by two multi Acoustic Optical Modulators (AGMs). It works using the raster-scan method, moving the glass plate backward and forward to produce a photo mask. It takes approximately five hours to complete plotting on a photo mask of 500 x 600 mm with a laser spot diameter of 5μmø, a pixel pitch of 2.5μm, and a plotting accuracy of ±5/μm, producing precise and uniform image quality throughout the mask. Because the image is produced by raster-scanning, it is possible to plot a mask of a given size in a fixed time regardless of variations in image data volume. This plotter can therefore produce a standard photo mask in a fraction of the time needed by conventional vector-type photoplotters.

Paper Details

Date Published: 6 July 1989
PDF: 6 pages
Proc. SPIE 1079, Hard Copy Output, (6 July 1989); doi: 10.1117/12.952788
Show Author Affiliations
Akira Kuwabara, Dainippon Screen Mfg Co., Ltd. (Japan)
Koji Ozaki, Dainippon Screen Mfg Co., Ltd. (Japan)
Takumi Yoshida, Dainippon Screen Mfg Co., Ltd. (Japan)

Published in SPIE Proceedings Vol. 1079:
Hard Copy Output
Leo Beiser; Stephen L. Corsover; John M. Fleischer; Vsevolod S. Mihajlov; Ken-Ichi Shimazu, Editor(s)

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