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Proceedings Paper

Three-Dimensional Surface Metrology Using A Computer-Controlled Non-Contact Instrument
Author(s): Keith N. Prettyjohns; James C. Wyant
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Paper Abstract

WYKO Corporation has developed a new instrument that is capable of measuring surface heights over an area from 0.5 mm square to 4.0 mm square. The instrument is based upon an interference microscope and uses direct phase measurement techniques to allow computer calculation and three-dimensional graphic display of the surface heights. The instrument uses a 256-by-256 grid of data points obtained from a photodiode array which provides a lateral resolution of 2 μm on the surface. Computer software has been written to perform statistical analysis of the surface under test, including surface roughness measurements and autocovariance. Results are shown for measurements of optical surfaces as well as magnetic media surfaces.

Paper Details

Date Published: 16 July 1986
PDF: 5 pages
Proc. SPIE 0599, Optics in Engineering Measurement, (16 July 1986); doi: 10.1117/12.952391
Show Author Affiliations
Keith N. Prettyjohns, WYKO Corporation (United States)
James C. Wyant, WYKO Corporation (United States)

Published in SPIE Proceedings Vol. 0599:
Optics in Engineering Measurement
William F. Fagan, Editor(s)

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