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Proceedings Paper

Heterodyne Interferometric Profilometer
Author(s): G. L. Bourdet; R. A. Muller
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Paper Abstract

Homodyne interferometry has been largely used for optical surfaces characterization. However, when quantitative data are required, this technique is very time consuming. Direct phase measurement by heterodyne interferometry can provide a fast and accurate means of obtaining surface profiles. In the following paper, we describe such a method making it possible to determine surfaces shapes.

Paper Details

Date Published: 1 May 1986
PDF: 7 pages
Proc. SPIE 0590, Infrared Technology and Applications, (1 May 1986); doi: 10.1117/12.951992
Show Author Affiliations
G. L. Bourdet, Ecole Polytechnique - ENSTA (France)
R. A. Muller, Ecole Polytechnique - ENSTA (France)

Published in SPIE Proceedings Vol. 0590:
Infrared Technology and Applications
Lionel R. Baker; Andre Masson, Editor(s)

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