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Proceedings Paper

Optical, Electrical And Structural Properties Of Composite Films Made Of Si, Ge And C
Author(s): Philippe M. Fauchet; Ian H. Campbell
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Paper Abstract

The properties of thin films made of alloys of Si, Ge, and C are investigated with Raman spectroscopy and other, mostly non-optical, techniques. The focus is on the relationship between structural, electronic. and optical properties. Three topics are investigated: the microcrystallinity in A thick (> 1000 Å) doped SiC films, the influence of the substrate on the properties of thin (< 1000 Å ) films, and possible heterogeneities in SiGe alloys. This study is the first step towards a better understanding of the relationship between the growth parameters and the electronic and optical properties that are useful in devices.

Paper Details

Date Published: 5 July 1989
PDF: 12 pages
Proc. SPIE 1055, Raman Scattering, Luminescence and Spectroscopic Instrumentation in Technology, (5 July 1989); doi: 10.1117/12.951590
Show Author Affiliations
Philippe M. Fauchet, Princeton University (United States)
Ian H. Campbell, Princeton University (United States)

Published in SPIE Proceedings Vol. 1055:
Raman Scattering, Luminescence and Spectroscopic Instrumentation in Technology
Fran Adar; James E. Griffiths; Jeremy M. Lerner, Editor(s)

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