The investigation of laser interaction with solid surfaces and of the resulting mechanism of surface modification are of technical interest to optimize technological processes, and they are also of fundamental scientific importance. Most instructive indormation is available with the ail of the in-situ techniques. For instance, measuring of the photon emission of the irradiated surface ane the plasma torch (if it is produced) simultaneously to laser action, makes it possible to gain a global characterization of the laser-solid interaction. In order to obtain additional information about surface and structure modifications in microscopic detail , a laser and scanning electron microscope were combined in to a tandem equipment (LASEM). Inside this eqiipment the microscopic observation is carried out directly at the laser irradiated area without any displacement of the sample. In this way, the stepwise development of surface modification during multipulse irradiation is visible in microscopic details and much more reliable information about the surface modification process is obtainable in comparison to an external laser irradiation. Such kind of equipments were realized simultaneously and independently in the Institut of General Physics (Moscow) and the Central Institute of Solid State Physics and Material Research (Dresden) using a CO₂ and a LTd-glass-laser, respectively. In the following the advantages and possibilities of a LASEM shall be demonstrated by some selected investigations of WC-CO hardmeta. The results were obtained in collaboration by both groups with the aid of the pulsed CO₂-laser. The TEA CO₂ laser was transmitted through a ZnSe-window into the sample chamber of the SEM and focused ofAo tfte sample surface. It was operated in TEM - oo mode with a repetition rate of about 1 pulse per second. A peak power density of about 160 MW/cm² was achieved in front of the sample surface.

Date Published: 18 May 1989
PDF: 4 pages
Proc. SPIE 1033, Trends in Quantum Electronics, (18 May 1989); doi: 10.1117/12.950627

Published in SPIE Proceedings Vol. 1033:
Trends in Quantum Electronics
Ioan Ursu, Editor(s)