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Proceedings Paper

Confocal Interference Microscopy
Author(s): Colin J.R Sheppard; Douglas K. Hamilton; Hubert J. Matthews
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Paper Abstract

Confocal imaging is a coherent technique so that the amplitude and phase information can be extracted using interference techniques. A confocal interference microscope has been constructed based on a Michaelson interferometer. Phase changes of 25 mrad., corresponding to height changes of 1 nm. can be detected. The interferometer can be used to measure surface profiles, and also to measure aberrations in the optical system.

Paper Details

Date Published: 9 February 1989
PDF: 6 pages
Proc. SPIE 1028, Scanning Imaging, (9 February 1989); doi: 10.1117/12.950317
Show Author Affiliations
Colin J.R Sheppard, Oxford University (England)
Douglas K. Hamilton, Oxford University (England)
Hubert J. Matthews, Oxford University (England)

Published in SPIE Proceedings Vol. 1028:
Scanning Imaging
Tony Wilson, Editor(s)

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