Proceedings PaperExcentration Errors Combined With Wavefront Aberration In A Coherent Scanning Microscope
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The Coherent Scanning Microscope (CSM) is mainly composed of two objectives arranged in tandem combined with the scanned object. The synchronized scanning of both of the object and the electron beam emitted from the cathod ray monitor will assure the construction of the temporal image. Since it is easy to aligne the first objective of the CSM, while it is not the case for the second objective, hence we assume that the later objective is subjected to tilting and to a lateral shift with respect to the first aligned objective. Another case assumes that the second objective is influenced by coma of third order in addition to the exoentration errors. In both cases, the resulting impulse response hr= h1h2, is calculated. The above mentioned problems of excentration errors combined with wavefront aberration, which are both harmfull for the microscope resolution, are discussed.