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Proceedings Paper

Holographic Generation Of Gratings With Periodicities Below 150 nm With An Excimer Laser
Author(s): T. Ahlhorn; H. Pohlmann; J. P. Kotthaus
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Paper Abstract

Holographic generation of gratings with periodicities down to 140nm in thin polymethyl methacrylate (PMMA) layers on Si-substrates using a narrow band KrF-excimer laser (λ=248 nm) is reported. At low single pulse energy densities (<3OmJ/cm2) the gratings are prepared by conventional photolithography. At higher single pulse energy densities (>70mJ/cm2) we directly write gratings in the PMMA by photoetching (ablation).

Paper Details

Date Published: 26 April 1989
PDF: 5 pages
Proc. SPIE 1023, Excimer Lasers and Applications, (26 April 1989); doi: 10.1117/12.950154
Show Author Affiliations
T. Ahlhorn, Universitat Hamburg (Federal Republic of Germany)
H. Pohlmann, Universitat Hamburg (Federal Republic of Germany)
J. P. Kotthaus, Universitat Hamburg (Federal Republic of Germany)

Published in SPIE Proceedings Vol. 1023:
Excimer Lasers and Applications
Dirk Basting, Editor(s)

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