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Proceedings Paper

A 1 kW E-Beam Pumped Excimer Laser
Author(s): Craig F. Zahnow
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Paper Abstract

The design and operation of a large, repetitively pulsed e-beam laser is described. The laser is capable of 100 Hz operation and has an average power of over 1 kW.

Paper Details

Date Published: 26 April 1989
PDF: 7 pages
Proc. SPIE 1023, Excimer Lasers and Applications, (26 April 1989); doi: 10.1117/12.950127
Show Author Affiliations
Craig F. Zahnow, Maxwell Laboratories, Inc. (United States)

Published in SPIE Proceedings Vol. 1023:
Excimer Lasers and Applications
Dirk Basting, Editor(s)

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