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Proceedings Paper

High Efficiency Switchless Operation Of A 0.5 J UV Preionized Excimer Laser
Author(s): Didier Beaupere; Claude Gagnol; Michel Huguet; Bernard Lacour; Annick Lavenant; Pierre Pinson
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Paper Abstract

Operation of the discharge excimer laser in the "switchless" mode offers an interesting opportunity for high average power industrial excimer laser design. Its potential for high efficiency, energy and repetition rate has been recently investigated and fullfills early expectations. When properly used, U.V. corona preionization still remains attractive for active volumes below one liter and must be taken into account among the various trade off for future products in the 1kW average power range.

Paper Details

Date Published: 26 April 1989
PDF: 5 pages
Proc. SPIE 1023, Excimer Lasers and Applications, (26 April 1989); doi: 10.1117/12.950121
Show Author Affiliations
Didier Beaupere, Laboratoires de Marcoussis (France)
Claude Gagnol, Laboratoires de Marcoussis (France)
Michel Huguet, Laboratoires de Marcoussis (France)
Bernard Lacour, Laboratoires de Marcoussis (France)
Annick Lavenant, Laboratoires de Marcoussis (France)
Pierre Pinson, Laboratoires de Marcoussis (France)

Published in SPIE Proceedings Vol. 1023:
Excimer Lasers and Applications
Dirk Basting, Editor(s)

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