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Proceedings Paper

Direct Writing Of Microcircuits By Laser-Assisted Processing Of Polymers
Author(s): Christian Decker
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Paper Abstract

A new method has been developed to produce conducting materials by surface chemical processing of a chlorinated polymer assisted by a CW laser. Polyvinylchloride (PVC) was first functionalized in order to absorb the 488.1 nm emission line of an argon ion laser. A short exposure of the polymer film to a 1 W laser beam, in the presence of air, leads to a complete removal of the chlorine and hydrogen atoms from the PVC backbone, with formation of a purely carbon material. The latter was shown to contain mainly graphite-type structures which are able to carry electrons, the electrical conductivity of the final product being comparable to that of graphite. Because of the high threshold energy of this solid state reaction, conventional radiation proved unable to induce the graphitization of PVC that occured within milliseconds under laser exposure, thus illustrating the unique possibilities of lasers for performing specific chemical reactions. By focusing the laser beam down into the micronic range, complex conductive patterns were directly drawn onto the photosensitive substrate at high speed. For practical applications of this laser writing technology in microelectronics, the delicate patterns were covered by a protective coating, using a photosensitive acrylic resin that hardens instantly under laser exposure, without affecting the electrical properties of the microcircuit.

Paper Details

Date Published: 10 April 1989
PDF: 6 pages
Proc. SPIE 1022, Laser Assisted Processing, (10 April 1989); doi: 10.1117/12.950111
Show Author Affiliations
Christian Decker, Laboratoire de Photochimie Generale (France)

Published in SPIE Proceedings Vol. 1022:
Laser Assisted Processing
Lucien Diego Laude; Gerhard K. Rauscher, Editor(s)

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