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Proceedings Paper

Stability Of The Spectral Characteristics Of Ion Plated Interference Filters
Author(s): Johannes Edlinger; Jurgen Ramm; Hans K. Pulker
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Paper Abstract

Ta205/Si02, Zr02/SiO2 and TiO2/SiO2 multilayer optical interference filters were deposited in a Balzers2BAP 800 coatiftg plant by reactive low-voltage ion plating. The spectral filter characteristics were investigated with respect to time and temperature. The observed stability is correlated to the water and hydrogen contents. The temperature derivatives of the refractive index of TiO2, ZrO2 and Ta205 were estimated.

Paper Details

Date Published: 27 February 1989
PDF: 5 pages
Proc. SPIE 1019, Thin Film Technologies III, (27 February 1989); doi: 10.1117/12.950035
Show Author Affiliations
Johannes Edlinger, BALZERS AG (Liechtenstein)
Jurgen Ramm, BALZERS AG (Liechtenstein)
Hans K. Pulker, BALZERS AG (Liechtenstein)

Published in SPIE Proceedings Vol. 1019:
Thin Film Technologies III
Karl H. Guenther; Hans K. Pulker, Editor(s)

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