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Proceedings Paper

Laser-Gyro Mirrors Of Differing Layer Structure
Author(s): Dirk-Roger Schmitt
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Paper Abstract

High reflectance low-scatter mirrors have been developed for laser-gyro applications. Different types of multilayer systems: Ti02/Si02, Ag/Ti02/Si02, and Ta205/Si02 combinations were investigated. In the first system TiO2 was rf-sputtered while Si02 was electron-gun evaporated. The best results were achieved for these materials with 21 alternating λ /4 layers. In the second system a thin silver film was rf-sputtered as a first layer on the substrate. Ten additional dielectric layers on the silver base were deposited to reach the same reflectivity as with pure dielectric mirrors. In the third system both Ta205 and Si02 were electron-gun evaporated. The best quality was achieved with 29 alternating layers. The mirrors of Ti02/Si02 and Ag/Ti02/Si02 exhibited no shift of the center wave length after exposition to air, while the mirrors of Ta205 /Si02 showed a shift of 30 nm. The mirrors were investigated in terms of reflectivity and scattering using an ultraprecise measurement equipment. Scattering was measured in an Ulbricht integrating sphere; resolution: 0.2-10-6 . Reflectivity measurements were carried out in a special developed reflectometer; resolution: 10.10-6.

Paper Details

Date Published: 27 February 1989
PDF: 11 pages
Proc. SPIE 1019, Thin Film Technologies III, (27 February 1989); doi: 10.1117/12.950033
Show Author Affiliations
Dirk-Roger Schmitt, Institut fur Flugfuhrung (Germany)

Published in SPIE Proceedings Vol. 1019:
Thin Film Technologies III
Karl H. Guenther; Hans K. Pulker, Editor(s)

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