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Proceedings Paper

Numerical And Experimental Evaluations Of Multilayer Mirror For Soft X-Rays
Author(s): K. Etoh; I. Kataoka; K. Ito
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Paper Abstract

For the wavelength region from 24A to 44A, selection of materials used for the multi-layer mirror was done by computer simulation. The multilayers of Si02/Ni were produced by the ion beam sputtering method and evaluated by the C-K line, experimentally. In order to analyze scattering in the region of 0 ~ λ comparisons between the experimental results, and the solutions of Beckmann's theory and Extinction theory were done.

Paper Details

Date Published: 27 February 1989
PDF: 8 pages
Proc. SPIE 1019, Thin Film Technologies III, (27 February 1989); doi: 10.1117/12.950032
Show Author Affiliations
K. Etoh, Japan Aviation Electronics Industry, Limited (Japan)
I. Kataoka, Japan Aviation Electronics Industry, Limited (Japan)
K. Ito, Japan Aviation Electronics Industry, Limited (Japan)

Published in SPIE Proceedings Vol. 1019:
Thin Film Technologies III
Karl H. Guenther; Hans K. Pulker, Editor(s)

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