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Proceedings Paper

Intrinsic Mechanical Stresses In Sputtered Aluminium Films
Author(s): Roland Zarwasch; Eduard P. Rille; Hans K . Pulker
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Paper Abstract

By means of an optical in-situ stress monitor the intrinsic mechanical stresses in at various working gas pressures dc magnetron sputtered Al films were measured. At 0.1 Pa argon pressure the Al films showed compressive stresses, which decreased as the pressure was increased. The chemical composition of the films was investigated by AES and electron-beam microprobe. The content of oxygen and carbon was highest at high working gas pressures and low deposition rates. The argon content of all films was to small to be detected by microprobe analysis.

Paper Details

Date Published: 27 February 1989
PDF: 6 pages
Proc. SPIE 1019, Thin Film Technologies III, (27 February 1989); doi: 10.1117/12.950027
Show Author Affiliations
Roland Zarwasch, University of Innsbruck (Austria)
Eduard P. Rille, Wild Leitz (Switzerland)
Hans K . Pulker, Balzers AG (Liechtenstein)

Published in SPIE Proceedings Vol. 1019:
Thin Film Technologies III
Karl H. Guenther; Hans K. Pulker, Editor(s)

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