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Proceedings Paper

MAEIP Ti-N Thin Films
Author(s): Tian Dazhun; Yin Zhigiang; Yan Zhanggen; Wang Guoqing; Xu Zhiqian
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Paper Abstract

A magnetron arc evaporation ion plating(MAEIP) system has been constructed using disk titanium cathode Ti-N thin film with gold-like colour has been prepared using MAEIP techniques. The reflectances of Ti-N thin films in the wavelength range 350-2500 nm has been measured at near normal incidence by UV-365 spectrophotometer. X-ray diffraction analysis shows that the magnetron arc evaporation ion plated Ti-N thin films are polycrystalline TiN. The TiN thin films as decorative and hard coatings have been widely used in the watch-covers, watch-chains, Badding iron balls and tools, etc.

Paper Details

Date Published: 27 February 1989
PDF: 4 pages
Proc. SPIE 1019, Thin Film Technologies III, (27 February 1989); doi: 10.1117/12.950018
Show Author Affiliations
Tian Dazhun, Beijing Research Institute of Automation for Machine Building (China)
Yin Zhigiang, Tsinghua University (China)
Yan Zhanggen, Tsinghua University (China)
Wang Guoqing, Tsinghua University (China)
Xu Zhiqian, Beijing Research Institute of Automation for Machine Building (China)

Published in SPIE Proceedings Vol. 1019:
Thin Film Technologies III
Karl H. Guenther; Hans K. Pulker, Editor(s)

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