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Proceedings Paper

Comparison Between Yttrium Oxide And Hydrogenated Amorphous Carbon Thin Films For Infrared Applications As Protective Coatings.
Author(s): E. Masetti; S. Scaglione; L. Caneve; G. Emiliani
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Paper Abstract

Critical environmental conditions require optical components with enhanced surface characteristics in respect of mechanical and chemical damage. To this purpose, protective films that improve substrate cl-ia.:acte,-fistics without detriment of optical properties are used. In this paper a comparison between he properties of Y 0 and a-C:H as protective coatings in the 8-12 um is reported. The Y 0 films have been deposited by r.f. Sputtering and a-C:H by Dual ION Beam Sputtering on glass and germanium substrate. The measurements of refractive index and extinction coefficient of these films in the infrared wavelength range are presented. Moreover, the ultra-microhardness and adhesion of deposited films are compared.

Paper Details

Date Published: 27 February 1989
PDF: 5 pages
Proc. SPIE 1019, Thin Film Technologies III, (27 February 1989); doi: 10.1117/12.950017
Show Author Affiliations
E. Masetti, Thin Film Laboratory (Italy)
S. Scaglione, Thin Film Laboratory (Italy)
L. Caneve, Contek s.r.l. (Italy)
G. Emiliani, Thin Film Laboratory (Italy)

Published in SPIE Proceedings Vol. 1019:
Thin Film Technologies III
Karl H. Guenther; Hans K. Pulker, Editor(s)

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