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Proceedings Paper

Optical Stethoscopy: Imaging With X/20
Author(s): D. W. Pohl; W. Denk; U. Duerig
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Paper Abstract

Unprecedented optical image resolution has been obtained using a near-field optical scanner called "optical stethoscope": 20 to 30 nm with blue light of half a micron wavelength! Key element is an extremely small aperture (5-10 nm) placed at the very top of a sharply pointed pyramidal or conical screen. The aperture is scanned in the immediate proximity of the surface to be investigated. The amount of light transmitted by both aperture and sample depends sensitively on the optical properties of the sample in the immediate vicinity of the aperture.

Paper Details

Date Published: 2 January 1986
PDF: 6 pages
Proc. SPIE 0565, Micron and Submicron Integrated Circuit Metrology, (2 January 1986); doi: 10.1117/12.949732
Show Author Affiliations
D. W. Pohl, IBM Zurich Research Laboratory (Switzerland)
W. Denk, IBM Zurich Research Laboratory (Switzerland)
U. Duerig, IBM Zurich Research Laboratory (Switzerland)

Published in SPIE Proceedings Vol. 0565:
Micron and Submicron Integrated Circuit Metrology
Kevin M. Monahan, Editor(s)

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