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Proceedings Paper

Piezoelectric Translators With Submicron Accuracy
Author(s): Karl Spanner; Harry Marth; Warren Gutheil
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Paper Abstract

In manufacturing integrated circuits, the tendency is toward smaller and smaller structures. Therefore the requirements for accurate micropositioning in lithography and wafer handling are growing more stringent. In many cases even a positioning accuracy of 0.1 micron is not good enough. But traditional precision mechanical positioners come to their limits in this range. Play, backlash, elasticity, friction and temperature changes can only be partially eliminated. One possible way to overcome these problems is with positioners based on the inverse piezo effect.

Paper Details

Date Published: 2 January 1986
PDF: 4 pages
Proc. SPIE 0565, Micron and Submicron Integrated Circuit Metrology, (2 January 1986); doi: 10.1117/12.949730
Show Author Affiliations
Karl Spanner, Physik Instrumente GmbH (West Germany)
Harry Marth, Physik Instrumente GmbH (West Germany)
Warren Gutheil, Physik Instrumente GmbH (West Germany)

Published in SPIE Proceedings Vol. 0565:
Micron and Submicron Integrated Circuit Metrology
Kevin M. Monahan, Editor(s)

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