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Proceedings Paper

Automatic Wafer Stepper Calibration And Testing
Author(s): Chris K. Van Peski
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Paper Abstract

Wafer stepper calibration and testing may be facilitated by using the auto wafer aligner feature of the wafer stepper as a metrology tool. This paper describes the procedures utilized in the calibration and acceptance testing of wafer steppers. The method of collecting data is explained, as well as the algorithms used to calculate calibration factors. Data from actual system tests is presented.

Paper Details

Date Published: 2 January 1986
PDF: 4 pages
Proc. SPIE 0565, Micron and Submicron Integrated Circuit Metrology, (2 January 1986); doi: 10.1117/12.949725
Show Author Affiliations
Chris K. Van Peski, THE Semiconductor Equipment Corp. (United States)

Published in SPIE Proceedings Vol. 0565:
Micron and Submicron Integrated Circuit Metrology
Kevin M. Monahan, Editor(s)

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