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Proceedings Paper

Novel Characterization Of Thin Film Multilayered Structures: Microcleavage Transmission Electron Microscopy
Author(s): Yves Lepetre; Ivan K. Schuller; George Rasigni; Rene Rivoira; Roger Philip; Pierre Dhez
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Paper Abstract

Microcleavage Transmission Electron Microscopy has been applied to the study of many properties of multilayered samples. We illustrate the unique capabilities of this technique to study long range perpendicular thickness drifts, lateral variations, roughness, substrate quality and island structures.

Paper Details

Date Published: 6 May 1985
PDF: 6 pages
Proc. SPIE 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics, (6 May 1985); doi: 10.1117/12.949675
Show Author Affiliations
Yves Lepetre, Argonne National Laboratory (United States)
Ivan K. Schuller, Argonne National Laboratory (United States)
George Rasigni, Universite Aix-Marseille III (France)
Rene Rivoira, Universite Aix-Marseille III (France)
Roger Philip, Universite Aix-Marseille III (France)
Pierre Dhez, Universite de Paris-Sud (France)

Published in SPIE Proceedings Vol. 0563:
Applications of Thin Film Multilayered Structures to Figured X-Ray Optics
Gerald F. Marshall, Editor(s)

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