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Proceedings Paper

Characterization Of Multilayered Structures For Soft X-Ray Mirrors
Author(s): J. P. Chauvineau; J. Corno; D. Decanini; L. Nevot; B. Pardo
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Paper Abstract

Three different experimental techniques are applied to the measurement of physical parameters involved in the determination of the optical performances of multilayers designed for soft X-ray mirrors. Geometrical parameterssuch as single layer thicknesses, multilayer period and interface roughness are evaluated by using soft X-ray reflectometry during the deposition process and grazing incidence X-ray reflectometry with the Cu K, radiation after the multilayer fabrication. The growth mechanism and surface composition of ultra-thin films constituting the multilayers are obtained by Auger electron spectroscopy performed during the layer deposition. The whole of these measurements is applied to elaborate a modelisa-tion of the real multilayers in view of their optical applications.

Paper Details

Date Published: 6 May 1985
PDF: 8 pages
Proc. SPIE 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics, (6 May 1985); doi: 10.1117/12.949673
Show Author Affiliations
J. P. Chauvineau, Universite Paris XI (France)
J. Corno, Universite Paris XI (France)
D. Decanini, Universite Paris XI (France)
L. Nevot, Universite Paris XI (France)
B. Pardo, Universite Paris XI (France)

Published in SPIE Proceedings Vol. 0563:
Applications of Thin Film Multilayered Structures to Figured X-Ray Optics
Gerald F. Marshall, Editor(s)

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