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Proceedings Paper

Determination Of Thickness Errors And Boundary Roughness From The Measured Performance Of A Multilayer Coating
Author(s): Eberhard Spiller; Alan E. Rosenbluth
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Paper Abstract

The influence of thickness errors and boundary imperfections on the performance of a multilayer x-ray mirror is discussed and it is shown that both can be obtained separately from a measured reflectivity curve at a short x-ray wavelength. Multilayers have greatly reduced scattering compared to single films, and for this reason rough boundaries and gradual transition layers between the film materials give practically identical performance. A simple Debye-Waller factor is not sufficient to describe the performance of a multilayer with many layers at short wavelengths.

Paper Details

Date Published: 6 May 1985
PDF: 17 pages
Proc. SPIE 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics, (6 May 1985);
Show Author Affiliations
Eberhard Spiller, IBM T. J. Watson Research Center (United States)
Alan E. Rosenbluth, IBM T. J. Watson Research Center (United States)


Published in SPIE Proceedings Vol. 0563:
Applications of Thin Film Multilayered Structures to Figured X-Ray Optics
Gerald F. Marshall, Editor(s)

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