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Proceedings Paper

Modification Of The Statistical Microroughness Of Surfaces By Thin Film Deposition: A Model
Author(s): Heinz-Gunter Walther; Angela Duparre
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Paper Abstract

A model describing the modification of a surface roughness profile due to thin film deposition is presented. Surface smoothing as well as roughening are found to be significant effects. Conclusions which can be drawn from the roughness model with respect to related light scattering make it possible to interpret film scattering experimentally observed.

Paper Details

Date Published: 11 April 1989
PDF: 5 pages
Proc. SPIE 1015, Micromachining Optical Components and Precision Engineering, (11 April 1989); doi: 10.1117/12.949454
Show Author Affiliations
Heinz-Gunter Walther, University of Jena (GDR)
Angela Duparre, University of Jena (GDR)

Published in SPIE Proceedings Vol. 1015:
Micromachining Optical Components and Precision Engineering
Peter Langenbeck, Editor(s)

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