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Proceedings Paper

Fully Planar GaAs Waveguides By Spin-On Glass Zinc Diffusion
Author(s): Y. Gigase; R. Baets; M. Belanger; S. I. Najafi
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Paper Abstract

We present the details of a new fabrication technique for making planar waveguides in III-V semiconductors. Using this technique we made single mode totally planar waveguides in GaAs with measured propagation losses of 1.9 dB/cm.

Paper Details

Date Published: 5 April 1989
PDF: 4 pages
Proc. SPIE 1014, Micro-Optics, (5 April 1989); doi: 10.1117/12.949406
Show Author Affiliations
Y. Gigase, University of Ghent-IMEC (Belgium)
R. Baets, University of Ghent-IMEC (Belgium)
M. Belanger, National Optics Institute (Canada)
S. I. Najafi, Ecole Polytechnique (Canada)

Published in SPIE Proceedings Vol. 1014:
Anna Maria Verga Scheggi, Editor(s)

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