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Proceedings Paper

Applications Of Laser Diodes In Interferometry
Author(s): A. J. den Boef
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Paper Abstract

Two laser diode-based interferometers are described. The first one, which is only briefly described here, is a two-wavelength scanning spot interferometer employing two laserdiodes. This interferometer has been used for surface contouring with micrometer resolution. The second interferometer, which will be emphasised in this paper, is a heterodyne interferometer. This interferometer is particularly useful for surface profiling with nanometer resolution.

Paper Details

Date Published: 15 February 1989
PDF: 7 pages
Proc. SPIE 1010, Industrial Inspection, (15 February 1989); doi: 10.1117/12.949192
Show Author Affiliations
A. J. den Boef, Philips Research Laboratories (The Netherlands)

Published in SPIE Proceedings Vol. 1010:
Industrial Inspection
Donald W. Braggins, Editor(s)

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