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Proceedings Paper

Comparison Of Light Scattering From Rough Surfaces With Optical And Mechanical Profilometry
Author(s): R. Brodmann; M. Allgauer
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Paper Abstract

Light scattering and non-contact sensing of rough surfaces with a laser focus are two optical methods which recently have also become available as commercial instruments. Optical measurements are compared with mechanical stylus measurements and the results are discussed under consideration of the physics of the different measuring principles.

Paper Details

Date Published: 21 March 1989
PDF: 8 pages
Proc. SPIE 1009, Surface Measurement and Characterization, (21 March 1989); doi: 10.1117/12.949161
Show Author Affiliations
R. Brodmann, Optische Werke G. Rodenstock (Germany)
M. Allgauer, Optische Werke G. Rodenstock (Germany)

Published in SPIE Proceedings Vol. 1009:
Surface Measurement and Characterization
Jean M. Bennett, Editor(s)

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