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Proceedings Paper

Growth Of Diamond By Rf Plasma Assisted Chemical Vapor Deposition
Author(s): Duane E. Meyer; Natale J. Ianno; John A. Woollam; A. B. Swartzlander; A. J. Nelson
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Paper Abstract

Diamond particles have been produced by inductively coupled radio frequency plasma assisted chemical vapor deposition. Analysis indicates that particles having a thin graphitic surface, as well as diamond particles with no surface coatings have been deposited. Scanning electron microscopy analysis shows that particles are deposited on a pedestal which Auger spectroscopy indicates to be graphitic. This phenomenon has not been previously reported in the literature.

Paper Details

Date Published: 17 January 1989
PDF: 6 pages
Proc. SPIE 0969, Diamond Optics, (17 January 1989); doi: 10.1117/12.948142
Show Author Affiliations
Duane E. Meyer, University of Nebraska (United States)
Natale J. Ianno, University of Nebraska (United States)
John A. Woollam, University of Nebraska (United States)
A. B. Swartzlander, Solar Energy Research Institute (United States)
A. J. Nelson, Solar Energy Research Institute (United States)

Published in SPIE Proceedings Vol. 0969:
Diamond Optics
Albert Feldman; Sandor Holly, Editor(s)

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