Proceedings Paper
Growth Of Diamond By Rf Plasma Assisted Chemical Vapor Deposition| Format | Member Price | Non-Member Price |
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Paper Abstract
Diamond particles have been produced by inductively coupled radio frequency plasma assisted chemical vapor deposition. Analysis indicates that particles having a thin graphitic surface, as well as diamond particles with no surface coatings have been deposited. Scanning electron microscopy analysis shows that particles are deposited on a pedestal which Auger spectroscopy indicates to be graphitic. This phenomenon has not been previously reported in the literature.
Paper Details
Date Published: 17 January 1989
PDF: 6 pages
Proc. SPIE 0969, Diamond Optics, (17 January 1989); doi: 10.1117/12.948142
Published in SPIE Proceedings Vol. 0969:
Diamond Optics
Albert Feldman; Sandor Holly, Editor(s)
PDF: 6 pages
Proc. SPIE 0969, Diamond Optics, (17 January 1989); doi: 10.1117/12.948142
Show Author Affiliations
Duane E. Meyer, University of Nebraska (United States)
Natale J. Ianno, University of Nebraska (United States)
John A. Woollam, University of Nebraska (United States)
Natale J. Ianno, University of Nebraska (United States)
John A. Woollam, University of Nebraska (United States)
A. B. Swartzlander, Solar Energy Research Institute (United States)
A. J. Nelson, Solar Energy Research Institute (United States)
A. J. Nelson, Solar Energy Research Institute (United States)
Published in SPIE Proceedings Vol. 0969:
Diamond Optics
Albert Feldman; Sandor Holly, Editor(s)
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